did you build your kernel yourself? I have never gotten any nvidia drivers to work without resourting to building the kernel from the kernel source, then building the nvidia drivers.
I know there is a way around this, but I have yet to committ it to memory.
also did you run an md5sum on your drivers to ensure they downloaded ok?
try make clean.
...And now abideth faith, hope, charity, these three; but the greatest of these is charity.